For citation:
Pankratov E. L. Relaxation time of dopant concentration in inhomogeneous medium with time-varying diffusion coefficient. Izvestiya VUZ. Applied Nonlinear Dynamics, 2004, vol. 12, iss. 3, pp. 35-44. DOI: 10.18500/0869-6632-2004-12-3-35-44
Relaxation time of dopant concentration in inhomogeneous medium with time-varying diffusion coefficient
In this paper the dynamics of dopant diffusion in an inhomogeneous medium with time-varying diffusion coefficient is analyzed. The conditions on spatial and temporal varying of diffusion coefficient, which correspond to maximal acceleration and deceleration of dopant diffusion time, have been determined.
1. Stepanenko I.P. Fundamentals of Microelectronics. Moscow: Mir Publishers; 1982. 455 p.
2. Tugov NM, Glebov BA, Charykov NA. Semiconductor Devices. Moscow: Energoatomizdat; 1990. 576 p. (in Russian).
3. Shishianu SG, Shishianu TC, Railyan SK. Small pn junctions in Si fabricated by pulsed photon annealing. Semiconductors. 2002;36(5):611–617. (in Russian).
4. Vaulina OS. Ciffusion of macroparticles and the criterion of phase transitions for dust structures in weakly ionized plasma J. Exp. Theor. Phys. 2002;121(1):35–46. (in Russian).
5. Zon BA, Ledovsky SB, Likholet AN. Acceleration of the diffusion of an impurity in a solid by a heterogeneous reaction on its surface. Tech. Phys. 2000;70(4):38–41. (in Russian).
6. Dolbak AE, Zhachuk RA, Olshanetsky BA. Mechanism of Cu diffusion along the Si(110) surface. Semiconductors. 2002;36(9):1031–1034. (in Russian).
7. Coffey VT, Crothers DSF, Kalmykov YuP. Effect оf uniform bias force оf the Brownian movement in double-well potential. Phys. Rev. Е. 1997;55(4):4812.
8. Dubkov AA, Maltsev AA, Pankratov EL. Effective time to establish the concentration of a substance in a medium with a slightly inhomogeneous diffusion coefficient. Tech. Phys. 2002;72(11):14. (in Russian).
9. Malakhov AN, Pankratov EL. Time to establish the concentration of a substance in a medium with the diffusion coefficient and potential randomly varying in space. Radiophysics and Quantum Electronics. 2001;44(4):367–373. (in Russian).
10. Maltsev AA, Pankratov EL. Effective time to establish the concentration of a substance in a medium with a slightly inhomogeneous diffusion coefficient. In: Proceedings of the Fifth Scientifis Conference on Radiophysics devoted to the 100-th Anniversary of AA Andronov's Birth. 7 May 2001, Nizhny Novgorod, Russia. Nizhny Novgorod: Nizhny Novgorod State University, 2001. P. 211. (in Russian).
11. Pankratov EL. Acceleration and deceleration of diffusion in a medium by temporal modulation of the diffusion coefficient. Izvestiya VUZ. Applied Nonlinear Dynamics. 2003;1(2):96–101. (in Russian).
12. Korn G, Korn T. Mathematical Handbook for Scientists and Engineers. Moscow: Nauka, 1977. 830 p. (in Russian).
13. Malakhov AN, Pankratov AL. Evolution times оf probability distribution and averages-exact solutions оf the Kramers’ problem. Adv. in Chem. Phys. 2002;121:356. (in Russian).
14. Zhang AP, Dang GT, Ren F, Han F, Baca J, Shul AG, Cho RJ, Monier H, Cao C, Abernathy XA, Pearton CR, SJ. Direct-current characteristics of pnp AlGaN/GaN heterojunction bipolar transistor. Appl. Phys. Let. 2000;76(20):2943–2945.
15. Gonorovsky IS. Radio Circuits and Signals. Moscow: Sovetskoe Radio; 1977. 606 p. (in Russian).
16. Gillin WP, Dunstan DJ. Strain аnd interdiffusion in semiconductor heterostructure. Phys. Rev. B. 1994;50(11):7495–7498. DOI: 10.1103/PhysRevB.50.7495.
- 134 reads